JPH0418430U - - Google Patents
Info
- Publication number
- JPH0418430U JPH0418430U JP5975690U JP5975690U JPH0418430U JP H0418430 U JPH0418430 U JP H0418430U JP 5975690 U JP5975690 U JP 5975690U JP 5975690 U JP5975690 U JP 5975690U JP H0418430 U JPH0418430 U JP H0418430U
- Authority
- JP
- Japan
- Prior art keywords
- mfc
- material gas
- constant temperature
- mixing
- mocvd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 5
- 239000013078 crystal Substances 0.000 claims description 3
- 238000007865 diluting Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5975690U JPH0418430U (en]) | 1990-06-06 | 1990-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5975690U JPH0418430U (en]) | 1990-06-06 | 1990-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0418430U true JPH0418430U (en]) | 1992-02-17 |
Family
ID=31586536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5975690U Pending JPH0418430U (en]) | 1990-06-06 | 1990-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418430U (en]) |
-
1990
- 1990-06-06 JP JP5975690U patent/JPH0418430U/ja active Pending
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